发明名称 SURFACE CONTACT PROBE AND ELECTRICAL TREATMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To achieve electrical contact homogeneous to the longitudinal direction of a long electrode without damaging the surface thereof.SOLUTION: A surface contact probe for electrically contacting the other side electrode for performing an electrical treatment to the other side electrode by voltage application, current measurement or the like, and an electrical treatment device using thereof are provided. The surface contact probe includes a probe support which has electrical conductivity and is arranged facing the other side electrode, an elastic layer which is disposed on the probe support as one unit and is elastically contacted to the other side electrode, and an electrically conductive layer which is at least disposed on the surface of the elastic layer and is electrically contacted to the other side electrode, wherein the probe support is configured in a belt like shape and the elastic layer is configured in a hollow elastic projected shape.
申请公布号 JP2011196791(A) 申请公布日期 2011.10.06
申请号 JP20100063014 申请日期 2010.03.18
申请人 MICRONICS JAPAN CO LTD 发明人 HINO TAKU
分类号 G01R1/067;H01L31/04 主分类号 G01R1/067
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