| 摘要 |
PROBLEM TO BE SOLVED: To exactly perform vacuum deposition of a film with film thickness corresponding to crystal orientation of a round path of a crystal sphere.SOLUTION: This method for manufacturing a spherical surface acoustic wave device has: deposition material radiation steps (22, 31) of heating and evaporating a deposition material 22 in a vacuum container 21; support steps (32, 35) of rotatably supporting a piezoelectric crystal sphere 2 so that the round path 5 of the piezoelectric crystal sphere 2 which revolves surface acoustic waves 4 may face the radiation direction of radiated beams of the evaporated deposition material 22; and deposition control steps (1, 5, 32, 34, 35) of changing rotation speed of the piezoelectric crystal sphere 2 by the rotation support steps according to the crystal orientation of the round path to perform the vacuum deposition by film thickness distribution depending on the crystal orientation on the round path. |
