| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat insulator in a thermal CVD apparatus suppressing deterioration of quality of a carbon nanotube.SOLUTION: The heat insulator 21 disposed on the inner wall surface of a heating chamber 13 for forming the carbon nanotube on a substrate surface by thermal CVD is composed of a bottom wall heat insulation part 22 disposed on the bottom wall part 2a side, an upper wall heat insulation part 23 disposed on the upper wall part 2b side, and a side wall heat insulation part 24 disposed along a side wall part 2c and a partition wall 3, and a large number of thin metal shielding plates 25 are arranged side by side at predetermined intervals as each of the heat insulation parts 22-24. |
