发明名称 SEMICONDUCTOR DEVICE WITH BURIED GATES AND METHOD FOR FABRICATING THE SAME
摘要 A semiconductor device includes a supplementary layer and a silicon layer stacked over a substrate, a trench penetrating the supplementary layer and the silicon layer and formed over the substrate, a gate insulation layer formed along a surface of the trench, and a buried gate formed over the gate insulation layer and filling a portion of the trench.
申请公布号 US2011241106(A1) 申请公布日期 2011.10.06
申请号 US20100939534 申请日期 2010.11.04
申请人 发明人 LEE SEUNG-RYONG;AHN TAE-HANG
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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