| 摘要 |
PROBLEM TO BE SOLVED: To position an object precisely on stage equipment and exposure device, and a device manufacturing method.SOLUTION: An object is moved along a first axis, second axis and third axis crossing each other. The equipment includes a first member, a first mover assembly to move the first member along the first axis, a second member to retain the object, a second mover assembly to move the second member relative to the first member along the first axis, second axis and third axis, and a bearing member which is positioned on the first member and supports the second member movably in the direction along the first axis and second axis relative to the first member. The second mover assembly has a coil member and a magnetic member which produces a driving force to move the second member along the third axis relative to the first member cooperating with the coil member. The coil member and magnetic member are placed on the first member. |
