| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation-sensitive composition which can be cured by low-temperature heating, has good alkali developability and high radiation sensitivity, and capable of forming a cured film with excellent hardness and solvent resistance.SOLUTION: The radiation-sensitive composition contains[A] an alkali-soluble resin, [B] at least one compound selected from the group consisting of vinyloxyalkyloxetane and vinyloxyaryloxetane compounds, and [C] a compound which generates an acid when energy is imparted thereto. |
