| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a perovskite type titanium-containing complex oxide film having high crystallinity and less defects such as cracks and peeling.SOLUTION: In the method of manufacturing the perovskite type titanium-containing complex oxide film expressed by formula ATiO(the A site is at least one or more kinds of metal elements selected among Ca, Sr, Ba and Pb), a coating process for applying a coating agent for forming the complex oxide film on the substrate and a firing process for irradiating with a microwave the coating film on the substrate and calcinating the coating film are included, the coating agent for forming the complex oxide film is a solution containing a titanium compound coordinating β-diketone and a compound containing the A site metal element coordinating β-diketone. |
