| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum gauge measuring wider range of gas pressure with sufficient accuracy than a conventional vacuum gauge by reducing the interference of a driving signal to a vibration detection signal and preventing the contact between a vibrating body and a detection electrode by electrostatic attracting force.SOLUTION: The vacuum gauge is equipped with: a vibrating body 4; an excitation electrode 5 which faces the vibrating body 4 and drives the vibrating body 4 by an electrostatic force; a detection electrode 6 facing the vibrating body; a vibration detecting section for detecting the vibration of the vibrating body 4 by detecting the electrostatic capacitance between the vibrating body 4 and the detection electrode 6; a driving signal generating section for generating a driving signal which excites the vibrating body 4; and a pressure measuring section for measuring the pressure of an atmosphere from the vibration characteristics of the vibrating body 4 while maintaining the vibrating body 4 in resonant condition by applying the driving signal to the excitation electrode 5. The drive signal generating section is configured to generate the signal, as the driving signal, in which a direct current driving signal bias voltage is added to an alternating current signal. |
