发明名称 |
Self Aligning Automated Material Handling System |
摘要 |
A semiconductor workpiece processing system comprises at least one processing tool; a transport section configured to transport carriers to and from the processing tool; and a transport vehicle movably mounted on the transport section; wherein the transport vehicle is configured to: sense a location of a transport carrier alignment feature; adjust a location of a transport vehicle gripper based on the location of the transport carrier alignment feature; sense an attitude of the gripper at a point of engagement with the transport carrier; and adjust the location of the gripper based on the attitude of the gripper.
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申请公布号 |
US2011245964(A1) |
申请公布日期 |
2011.10.06 |
申请号 |
US20100754699 |
申请日期 |
2010.04.06 |
申请人 |
SULLIVAN ROBERT P;BUFANO MICHAEL L |
发明人 |
SULLIVAN ROBERT P.;BUFANO MICHAEL L. |
分类号 |
H01L21/677;H01L21/683 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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