DEVICE, METHOD AND PROGRAM FOR ADJUSTING RELATIVE PARALLELISM OF PROBE UNIT, PROBE UNIT AND PANEL CONVEYANCE MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a device that can confirm and adjust relative parallelism of a probe unit having probes contacting respective stripped electrodes to a panel member having the stripped electrodes arranged in parallel with each other in a short-length direction in a short period of time.SOLUTION: The device is equipped with: an inclination adjustment mechanism for adjusting the relative parallelism of the probe unit to the panel member; a plurality of sensors for detecting a distance between the probe unit and the panel member; a sensor output taking-in means for taking in the output from each sensor before and after the probes and the stripped electrodes relatively approach to contact with each other; and an adjustment reference information generating means for generating information to be referred to in adjusting the parallelism of the probe unit based on the taken-in outputs from the respective sensors.