| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction device and a droplet discharge device that prevent scratches generated on the back side of a workpiece, and suppress the generation of electrostatic.SOLUTION: The suction device includes: a stage 10 provided with a suction hole 11 for sucking a workpiece having a flat surface 10a; a vacuum pump 15 for generating a negative pressure connected to the suction hole 11 of the stage 10; and a belt driving device 20 wherein a porous belt 21, which is endlessly annular, is wrapped around a driving roller 25 and a driven roller 26. The stage 10 is arranged between the driving roller 25 and the driven roller 26 and the porous belt 21 is drivable in the same direction as the conveyance direction of the workpiece and the porous belt 21 is sucked by the stage 10 and the workpiece is sucked by the stage 10 through the porous belt 21. |
