ABRASIVE SLURRY FORMULATIONS CONTAINING NANO AND MICRO SPHERES ADDITIVES OR SELF-ASSEMBLED MONOLAYERS

摘要

This invention relates to methods for plate dressing using slurry charged with abrasives and soft polymeric or metallic micro-nano spheres additives to produce substantially uniform abrasive height. Additionally, methods for plate dressing using slurry charged with abrasives and self-assembled polymers to produce substantially uniform abrasive height are disclosed.