CONTROL OF LASER PROCESSING STEPS IN SOLAR CELL MANUFACTURE

摘要

Photoluminescence-based methods and systems are presented for monitoring laser processing steps in the manufacture of solar cells. The methods and systems can be used for process control purposes (e.g. adjusting a parameter of the laser exposure) or for quality control purposes (e.g. rejection of defective samples). In certain embodiments photoluminescence imaging is performed during or after a laser processing step to gauge the extent of defects induced by the laser exposure, while in other embodiments photoluminescence imaging is performed before a laser processing step to direct or adjust the subsequent laser exposure. The methods and systems of the invention can be used for example in an R&D environment to optimise a laser processing step, or in-line for real time process control or quality control of a laser processing step in a solar cell manufacture line. Laser processing in solar cell manufacture may for example be used for edge isolation or selective emitter formation.