发明名称 ELECTROFORMING MOLD AND METHOD OF PRODUCING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an electroforming mold which is produced according to a photolithography, is excellent in the fineness and aspect ratio and has an inclination part formed at a photoresist portion to be formed in an external shape, and to provide a method of producing the electroforming mold.SOLUTION: The electroforming mold 1 comprises: a substrate 2 that transmits ultraviolet rays; a conductive film 3 that has electric conductivity on a surface of the substrate and has UV-ray transmissibility; and a first photoresist layer that is formed on the upper surface of the conductive film and has a first through-hole inclined toward the upper surface of the first photoresist layer 4 from the upper surface of the conductive film.
申请公布号 JP2011195911(A) 申请公布日期 2011.10.06
申请号 JP20100065130 申请日期 2010.03.19
申请人 SEIKO INSTRUMENTS INC 发明人 KISHI MATSUO;SATO MIE;NIWA TAKASHI
分类号 C25D1/10;B29C33/38;B29C59/02;G03F7/20 主分类号 C25D1/10
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