FLOWRATE SENSOR AND FLOWRATE DETECTION DEVICE

摘要

Disclosed is a flowrate sensor having a flowrate detection means built into a surface mounted package. The flowrate sensor is equipped with: a fluid path (70) that is formed within the package (12), and which draws fluid from a fluid intake (30) provided to the underside of the package (12) to a fluid outlet (32) provided to the underside of the package (12) passing via a flowrate detection means; and an external terminal (40) that is provided to the outer surface of the package (12), and through which the electric output of the flowrate detection means is drawn. The flowrate sensor can be used for both fluids and gases. The flowrate sensor can be miniaturized, can be surface mounted on an electronic circuit board and the like, and is highly reliable.