METHOD AND SYSTEM OF TESTING SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To provide a test method and a test system of a semiconductor integrated circuit capable of easily testing contact between a test probe and a pad.SOLUTION: The method of testing a semiconductor integrated circuit includes steps of: turning ON a MOS transistor according to control voltage applied to a control terminal before testing an RF circuit while a first probe for applying a test signal is connected to a first signal terminal and a second probe for applying the test signal is connected to a second signal terminal; and determining whether or not the first probe is conductive with the first signal terminal and the second probe has continuity with the second signal terminal based on reflective waves from the semiconductor integrated circuit when AC signals from the first probe and the second probe are output.