| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-deposition device capable of stably producing a functional film preventing floating of a substrate from a drum caused by heating of the substrate and suppressing heat damage of the substrate caused by the floating from the drum in the film-deposition device performing film-deposition while a long substrate is wound around the drum and conveyed in a longitudinal direction.SOLUTION: The film-deposition device has a biasing unit abutting on a non-product region of the substrate wound around the drum and biasing the substrate to an outer side in the with direction of the substrate while conveyed together with the substrate. |
