发明名称 TIME RESOLVED PHOTOLUMINESCENCE IMAGING SYSTEMS AND METHODS FOR PHOTOVOLTAIC CELL INSPECTION
摘要 A time-resolved photoluminescence technique is disclosed to image photovoltaic cells and wafers. The effective lifetime is measured directly using a photodetector that has a fast response. A pulsed light source flashes the wafer, generating excess carriers in the silicon. The rate of carrier recombination is monitored by imaging the photoluminescence decay over time. An effective lifetime can be extracted from the photoluminescence decay curve, which can be used to determine the quality of the photovoltaic cells and wafers.
申请公布号 WO2011123469(A1) 申请公布日期 2011.10.06
申请号 WO2011US30394 申请日期 2011.03.29
申请人 INTEVAC, INC.;TRUE, BRUCE 发明人 TRUE, BRUCE
分类号 G01J3/40 主分类号 G01J3/40
代理机构 代理人
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