发明名称 |
SUBSTRATE CARRIER DEVICE, SUBSTRATE CARRYING METHOD, SUBSTRATE SUPPORTING MEMBER, SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, EXPOSURE METHOD AND DEVICE MANUFACTURING METHOD |
摘要 |
A substrate carry-out device (70) carries out an exposed substrate (P) mounted on a substrate stage (20) from a substrate holder (50) by moving the substrate (P) in one axis direction (X-axis direction) parallel to a horizontal plane in a state where the substrate (P) is mounted on a substrate tray (90) housed in the substrate holder (50). Meanwhile, a substrate carry-in device (80) makes an unexposed substrate (P) to be carried into the substrate stage (20) wait at a substrate exchange position in a state where the unexposed substrate (P) is mounted on another substrate tray (90), and after the exposed substrate (P) is carried out from the substrate stage (20), lowers the another substrate tray (90), thereby mounting the unexposed substrate (P) onto the substrate holder (50). |
申请公布号 |
WO2011065589(A3) |
申请公布日期 |
2011.10.06 |
申请号 |
WO2010JP71762 |
申请日期 |
2010.11.29 |
申请人 |
NIKON CORPORATION;AOKI, YASUO;SEKI, TADASHI;YANAGAWA, TAKUYA |
发明人 |
AOKI, YASUO;SEKI, TADASHI;YANAGAWA, TAKUYA |
分类号 |
H01L21/677;B65G49/06;G03F7/20 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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