发明名称 MOLD HAVING RELEASE LAYER FOR IMPRINTING, METHOD FOR PRODUCING MOLD HAVING RELEASE LAYER FOR IMPRINTING, AND METHOD FOR PRODUCING COPY MOLD
摘要 <p>Provided is a mold having a release layer, in which the release layer is disposed in the mold which transfers a specific uneven pattern onto a molding material to be patterned by means of the imprinting method, wherein the main chain of the molecular chains of a compound contained in the release layer contains fluorocarbons, the molecular chains of the compound have at least two adsorption functional groups that are adsorbed or bonded to the mold, the bonding energy in the adsorption functional groups that becomes the source of adsorption or bonding of the adsorption functional groups to the mold is greater than the bonding energy between one adsorption functional group and another adsorption functional group in the molecular chains of the compound, and the surface free energy of the release layer is optimized by means of heating.</p>
申请公布号 WO2011122605(A1) 申请公布日期 2011.10.06
申请号 WO2011JP57762 申请日期 2011.03.29
申请人 HOYA CORPORATION;SUZUKI KOTA;KOBAYASHI HIDEO 发明人 SUZUKI KOTA;KOBAYASHI HIDEO
分类号 B29C59/02;B29C33/38;H01L21/027 主分类号 B29C59/02
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