LIQUID HEATING METHOD, LIQUID HEATING APPARATUS, CLEANING METHOD FOR ELECTRONIC MATERIAL AND CLEANING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an fluid heating method, a liquid heating apparatus, a cleaning method for an electronic material, and a cleaning system capable of heating fluid such as a persulfuric acid-containing concentrated sulfuric acid to a high temperature in a short time.SOLUTION: A liquid is made to flow in a flow path whose flow path thickness or a flow path diameter is 10 mm or smaller. A microwave is irradiated toward a flow path surface from the thickness direction of the flow path or from one direction of the periphery. The microwave is irradiated toward the flow path surface for the flow path whose flow path thickness or flow path diameter is 25 mm or smaller from both sides of the thickness direction or from the entire periphery. Thus, the liquid flowing in the flow path is evenly heated instantly. A chemical change caused by heating the liquid can be suppressed. The method can be properly utilized for a cleaning system of the electronic material that uses a persulfuric acid as a cleaning liquid.