| 摘要 |
PROBLEM TO BE SOLVED: To highly accurately analyze a gas component even having a small specific gravity with higher detection sensitivity.SOLUTION: The gas analyzer includes a gas separation tube 1 which separates gas components from an analyzed gas using an agent for adsorbing or desorbing the gas components of the analyzed gas supplied together with a carrier gas, a spherical surface acoustic wave element 4 which makes sequentially the separated gas components contact with a circling surface acoustic wave and detects a signal change of the surface acoustic wave, and a signal excitation measuring means 10 which excites a high-frequency signal in the circling surface acoustic wave and measures a signal change of the excited surface acoustic wave receiving from the spherical surface acoustic wave element. The spherical surface acoustic wave element 4 has a spherical substrate 24 which includes a circular region containing a maximum outer circumferential circle of a sphere surface having at least a sphere shape and a surface acoustic wave excitation/detection means which causes the surface acoustic wave excited by the high-frequency signal to circle along an extending direction of the circular region and detects a signal change obtained from the surface acoustic wave after predetermined circling. |
