发明名称 PRODUCTION METHOD FOR SEMICONDUCTOR SINGLE CRYSTAL
摘要 <p>Disclosed is a semiconductor single crystal production method for producing a semiconductor single crystal in which the occurrence of defects is suppressed. Said production method involves a step for forming a boron oxide film (31) on the inner wall of a growing container (10) that has a bottom section and a body section connecting to said bottom section, a step for bringing a silicon oxide-containing boron oxide melt into contact with the boron oxide film (31) to form a silicon oxide-containing boron oxide film (32) on the inner wall of the growing container (10), a step for forming a starting material melt (34) upon a seed crystal (20) disposed on the bottom section within the growing container (10), and a step for growing a semiconductor single crystal by solidifying the starting material melt (34) from the seed crystal (20) side.</p>
申请公布号 WO2011122570(A1) 申请公布日期 2011.10.06
申请号 WO2011JP57665 申请日期 2011.03.28
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD.;SAKURADA, TAKASHI;KAWASE, TOMOHIRO;HAGI, YOSHIAKI 发明人 SAKURADA, TAKASHI;KAWASE, TOMOHIRO;HAGI, YOSHIAKI
分类号 C30B11/00;C30B27/00;C30B29/40 主分类号 C30B11/00
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