发明名称 |
PRODUCTION METHOD FOR SEMICONDUCTOR SINGLE CRYSTAL |
摘要 |
<p>Disclosed is a semiconductor single crystal production method for producing a semiconductor single crystal in which the occurrence of defects is suppressed. Said production method involves a step for forming a boron oxide film (31) on the inner wall of a growing container (10) that has a bottom section and a body section connecting to said bottom section, a step for bringing a silicon oxide-containing boron oxide melt into contact with the boron oxide film (31) to form a silicon oxide-containing boron oxide film (32) on the inner wall of the growing container (10), a step for forming a starting material melt (34) upon a seed crystal (20) disposed on the bottom section within the growing container (10), and a step for growing a semiconductor single crystal by solidifying the starting material melt (34) from the seed crystal (20) side.</p> |
申请公布号 |
WO2011122570(A1) |
申请公布日期 |
2011.10.06 |
申请号 |
WO2011JP57665 |
申请日期 |
2011.03.28 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD.;SAKURADA, TAKASHI;KAWASE, TOMOHIRO;HAGI, YOSHIAKI |
发明人 |
SAKURADA, TAKASHI;KAWASE, TOMOHIRO;HAGI, YOSHIAKI |
分类号 |
C30B11/00;C30B27/00;C30B29/40 |
主分类号 |
C30B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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