发明名称 EXPOSURE SYSTEM AND ALIGNER
摘要 PROBLEM TO BE SOLVED: To increase efficiency of an exposing process in a system of network-connecting a host computer with an aligner via a network and the aligner used in the same.SOLUTION: A server task is started immediately after turning on a power supply and network connection with the host computer is established by waiting for a connection request from the host computer. Then, the network connection with the host computer is established by waiting for the next connection request from the host computer without executing a starting-up process even when disconnection of the network connection is detected after establishment of the network connection. Thus, the total time for the exposing process can be more reduced than prior art in which the starting-up process is executed every time the network connection with the host computer is re-established.
申请公布号 JP2011199167(A) 申请公布日期 2011.10.06
申请号 JP20100066600 申请日期 2010.03.23
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 RYU GYOKUSHU
分类号 H01L21/027 主分类号 H01L21/027
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