发明名称 MASK AND MASK ASSEMBLY HAVING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a mask in which the deformation of a pattern opening part formed in a unit mask due to a tensile force applied to the unit mask is suppressed, and to provide a mask assembly having the mask.SOLUTION: The mask assembly includes: a frame including an opening part; and one or more unit masks which are located above the opening part and have both end parts supported by the frame while a tensile force being applied in one direction to the unit masks, wherein each of the unit masks includes a plurality of pattern opening parts arranged in the one direction and a first groove disposed adjacent to the pattern opening parts and between the pattern opening parts and an edge of the unit mask, and formed to be depressed from the surface of the unit mask.
申请公布号 JP2011195960(A) 申请公布日期 2011.10.06
申请号 JP20110051096 申请日期 2011.03.09
申请人 SAMSUNG MOBILE DISPLAY CO LTD 发明人 HONG JAE-MIN;KIM KYUNG-HAN
分类号 C23C14/04;H01L51/50;H05B33/10 主分类号 C23C14/04
代理机构 代理人
主权项
地址