| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a gas barrier film with high productivity which can achieve very high gas barrier performance and high durability.SOLUTION: The method of manufacturing a barrier film includes carrying out a process of applying a coating liquid containing a polysilazane to the surface of a substrate and drying and then forming a barrier layer by reforming the polysilazane through a process of irradiating the substrate with vacuum UV light from the side of the coated surface. Together with the irradiation of to-be-reformed sites with the vacuum UV light, a gas based on a gas ingredient not absorbing the vacuum UV light is sprayed onto the sites, and the gas spraying condition meets equation (1): 50≤T×Q/W/L≤150 (wherein, T is the temperature [°C]of the sprayed gas; Q is the flow rate [m/min] of the sprayed gas; W is the width, [m] of spraying of the gas; and L is the speed [m/min] of carrying the substrate). |
