| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact combustion type gas sensor for improving gas sensitivity, and maintaining a stable sensitivity characteristic for a long time.SOLUTION: The gas sensor comprises: a supporting insulation film 2 formed so as to bridge a recess 10 formed on a substrate 1; a sensing resistor 3A formed on the supporting insulation film 2, and having electrical resistance changed according to the combustion heat of a sensing target gas burnt by heat generated by energization; a plurality of openings 11 penetrating a protection film 4 and the supporting insulation film 2 in the longitudinal direction of the sensing resistor 3A in a vicinity of the sensing resistor 3A; and catalyst layers 12 integrally formed on both surfaces of the supporting insulation film 2 through the openings 11, covering the recess 10 of supporting insulation film 2 and the sensing resistor 3A on the opposite surface, and formed with a swelling section 12A swelling wider than an opened area of the openings 11 on the side of the recess 10 of the supporting insulation film 2. |
