| 摘要 |
PROBLEM TO BE SOLVED: To provide a vapor drying device and method for an optical element, capable of quickly and properly drying the optical element and reducing consumption of a solvent.SOLUTION: This vapor drying device 1 includes a vapor drying vessel section 2A filled with solvent vapor 5A to perform a vapor drying treatment on the optical element 12a, a cooling pipe 6 for cooling the solvent vapor 5A at an upper section of the vapor drying vessel section 2A, a heating drying vessel section 2B disposed at an upper side of the vapor drying vessel section 2A through the cooing pipe 6 to perform a heating drying treatment on the optical element 12a on which the vapor drying treatment is performed in the vapor drying vessel section 2A, and a cooling pipe 10 for cooling the solvent vapor 5B passing through the heating drying vessel section 2B at an upper side of the heating drying vessel section 2B. |
