发明名称 |
METHOD FOR PRODUCING COPPER-CLAD POLYIMIDE FILM SUBSTRATE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a copper-clad polyimide film substrate which does not have a fine depression on a metal layer surface to decrease a depression on the metal layer surface and a defect during wiring patterning.SOLUTION: A polyimide film is immersed and cleaned in an aqueous solution containing a primary amide compound and polyalkylene glycol. The timing of cleaning may be before or after forming a primary metal layer by a dry method, as long as it is before the copper layer to be a conductor is formed. It is also effective to treat twice before and after forming the primary metal layer by a dry method. |
申请公布号 |
JP2011195937(A) |
申请公布日期 |
2011.10.06 |
申请号 |
JP20100067022 |
申请日期 |
2010.03.23 |
申请人 |
SUMITOMO METAL MINING CO LTD |
发明人 |
SHIGA DAIKI |
分类号 |
C23C28/00;B32B15/08;B32B27/34;H05K3/18 |
主分类号 |
C23C28/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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