发明名称 METHOD FOR PRODUCING COPPER-CLAD POLYIMIDE FILM SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a method for producing a copper-clad polyimide film substrate which does not have a fine depression on a metal layer surface to decrease a depression on the metal layer surface and a defect during wiring patterning.SOLUTION: A polyimide film is immersed and cleaned in an aqueous solution containing a primary amide compound and polyalkylene glycol. The timing of cleaning may be before or after forming a primary metal layer by a dry method, as long as it is before the copper layer to be a conductor is formed. It is also effective to treat twice before and after forming the primary metal layer by a dry method.
申请公布号 JP2011195937(A) 申请公布日期 2011.10.06
申请号 JP20100067022 申请日期 2010.03.23
申请人 SUMITOMO METAL MINING CO LTD 发明人 SHIGA DAIKI
分类号 C23C28/00;B32B15/08;B32B27/34;H05K3/18 主分类号 C23C28/00
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