Method for manufacturing thin layer solar cell, involves forming microcrystalline layer stack on substrate by passing coated substrate into coating structure so that thin film solar cell is obtained

摘要

The method involves forming barrier layer by stacking amorphous layer stack and microcrystalline layer stack. The substrate (1A) is coated with amorphous layer stack by passing into deposition structure (A). The microcrystalline layer stack is formed on substrate by passing coated substrate into coating structure (B) so that thin film solar cell (1) is obtained.