INDIUM OXIDE SINTERED COMPACT AND SPUTTERING TARGET

摘要

A sintered body includes an indium oxide crystal, and an oxide solid-dissolved in the indium oxide crystal, the oxide being oxide of one or more metals selected from the group consisting of aluminum and scandium, the sintered body having an atomic ratio“(total of the one or more metals)/(total of the one or more metals and indium)×100)”of 0.001% or more and less than 45%.