Plasma apparatus comprising a heat sink

摘要

A plasma apparatus (1200) with improved cooling is disclosed. The plasma apparatus comprises a vessel (1210) defining a channel for containing a gas, a heat sink (1220) adjacent to the vessel, a thermal interface (1230) disposed between and in mechanical communication with the vessel and the heat sink; and an ultraviolet light blocking layer (1234) disposed between the vessel and the thermal interface. The thermal interface (1230) defines a space between the heat sink (1220) and the vessel that accommodates a movement of at least one of the thermal interface, the heat sink, and the vessel in response to thermally induced dimensional changes. The heat sink may have multiple segments urged toward the vessel by a spring-loaded mechanism (1291,1292).