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发明名称
HEAT TREATMENT APPARATUS
摘要
申请公布号
KR20110108233(A)
申请公布日期
2011.10.05
申请号
KR20100109155
申请日期
2010.11.04
申请人
KOYO THERMO SYSTEMS CO., LTD.
发明人
KASANAMI KATSUHISA;URASAKI YOSHIHIKO;NAKANISHI YUYA
分类号
H01L21/22;H01L21/205
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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