发明名称 USE OF AN OPTICAL FIBRE DEVICE FOR INTERFEROMETRIC ANALYSIS OF THE SURFACE CONDITION OF AN OBJECT
摘要 <p>The instant disclosure describes an optical device for the interferometric analysis of the surface condition of an object, including: a light source; an optical fibre capable of receiving the incident light wave and transmitting said wave to the object; a detector capable of detecting a combination between a light wave reflected by the optical fibre and a light wave returned by the object; and in which the optical fibre has a free end in the shape of a cone, with a vertex angle of between 15 and 25 degrees, the tip of the cone having dimensions of less than 50×50 nm, and the tip of the cone being placed, while in use, at a distance of between 5 and 50 &mu;m from the surface of the object.</p>
申请公布号 EP2370779(A1) 申请公布日期 2011.10.05
申请号 EP20090805803 申请日期 2009.12.29
申请人 UNIVERSITE JOSEPH FOURIER;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE;COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES 发明人 CHEVRIER, JOEL;HUANT, SERGE;SCHWARTZ, WILFRID;SIRIA, ALESSANDRO
分类号 G01B9/02;G01B7/34;G01B11/24;G01B21/00 主分类号 G01B9/02
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