Microengineered multipole ion guide

摘要

A microengineered multipole ion guide for use in miniature mass spectrometer systems is described. Exemplary methods of mounting rods 530 in quadrupole, hexapole, octupole and other multipole geometries are described. The rods 530 forming the ion guide are supported in etched silicon structures 540, 545 defined in at least first and second substrates 541 Which are kinematically connected to one another.