| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope system, having a simple constitution and restraining the degradation in sensitivity in obtaining an optical image of a specimen to be observed. SOLUTION: The microscope system 1 includes an objective lens 11 for forming an optical image of a specimen S placed on a stage 3; and imaging apparatus 15 for acquiring the optical image of the specimen by driving a CCD element 45, in which a plurality of pixels are arranged two-dimensionally, in a CCD mode or a TDI mode; and a controller 23 for driving the CCD element in the CCD mode or TDI mode and also adjusting the relative position of the objective lens and stage. When the CCD element is driven in the CCD mode, the controller obtains focusing information for obtaining the optical image of the specimen by the CCD element driven in the TDI mode, based on the optical image of the specimen. When the CCD element is driven in the TDI mode, the controller also obtains the optical image of the specimen by the CCD element driven in the TDI mode, while the objective lens is focused on the specimen based on the focusing information. COPYRIGHT: (C)2006,JPO&NCIPI |
