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发明名称
摘要
申请公布号	JP4786867(B2)	申请公布日期	2011.10.05
申请号	JP20030538426	申请日期	2001.09.25
申请人		发明人
分类号	C23C18/16;B44C1/22;B81C1/00;C23C18/18;C23C26/00;C23C28/00;G03F7/00;H01L21/027;H01L21/3205;H01L21/3213	主分类号	C23C18/16
代理机构		代理人
主权项
地址

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