发明名称 Etching of solar cell materials
摘要 A solar cell is fabricated by etching one or more of its layers without substantially etching another layer of the solar cell. In one embodiment, a copper layer in the solar cell is etched without substantially etching a topmost metallic layer comprising tin. For example, an etchant comprising sulfuric acid and hydrogen peroxide may be employed to etch the copper layer selective to the tin layer. A particular example of the aforementioned etchant is a Co-Bra Etch® etchant modified to comprise about 1% by volume of sulfuric acid, about 4% by volume of phosphoric acid, and about 2% by volume of stabilized hydrogen peroxide. In one embodiment, an aluminum layer in the solar cell is etched without substantially etching the tin layer. For example, an etchant comprising potassium hydroxide may be employed to etch the aluminum layer without substantially etching the tin layer.
申请公布号 US8029683(B2) 申请公布日期 2011.10.04
申请号 US20080251296 申请日期 2008.10.14
申请人 SUNPOWER CORPORATION 发明人 ROSE DOUGLAS H.;URALWONG PONGSTHORN;SMITH DAVID D.
分类号 B29D11/00;B44C1/22;H01L;H01L31/00;H01L31/18 主分类号 B29D11/00
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