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发明名称
Manufacture of photovoltaic devices
摘要
A method and apparatus for depositing a film on a substrate includes subjecting material to an energy beam.
申请公布号
US8030121(B2)
申请公布日期
2011.10.04
申请号
US20060989966
申请日期
2006.08.03
申请人
FIRST SOLAR, INC
发明人
MEYERS PETER V.
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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