发明名称 AFM tweezers, method for producing AFM tweezers, and scanning probe microscope
摘要 AFM tweezers that include a first probe, including a triangular prism member having a tip of a ridge which is usable as a probe tip in a scanning probe microscope, and a second probe, including a triangular prism member provided so as to open/close with respect to the first probe, are provided. The first probe and the second probe are juxtaposed such that a predetermined peripheral surface of the triangular prism member of the first probe and a predetermined peripheral surface of the triangular prism member of the second probe face substantially in parallel to each other, and the first probe formed of a notch that prevents interference with a sample when the sample is scanned by the tip of the ridge.
申请公布号 US8028567(B2) 申请公布日期 2011.10.04
申请号 US20080143410 申请日期 2008.06.20
申请人 AOI ELECTRONICS CO., LTD.;SII NANO TECHNOLOGY INC. 发明人 KOBAYASHI TATSUYA;SUZUKI MASATO;YASUTAKE MASATOSHI;UMEMOTO TAKESHI
分类号 G01B5/28;B25J7/00;B25J15/08;B81B3/00;B81C1/00;G01Q30/20;G01Q60/38;G01Q70/10;G01Q80/00 主分类号 G01B5/28
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