发明名称 |
AFM tweezers, method for producing AFM tweezers, and scanning probe microscope |
摘要 |
AFM tweezers that include a first probe, including a triangular prism member having a tip of a ridge which is usable as a probe tip in a scanning probe microscope, and a second probe, including a triangular prism member provided so as to open/close with respect to the first probe, are provided. The first probe and the second probe are juxtaposed such that a predetermined peripheral surface of the triangular prism member of the first probe and a predetermined peripheral surface of the triangular prism member of the second probe face substantially in parallel to each other, and the first probe formed of a notch that prevents interference with a sample when the sample is scanned by the tip of the ridge.
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申请公布号 |
US8028567(B2) |
申请公布日期 |
2011.10.04 |
申请号 |
US20080143410 |
申请日期 |
2008.06.20 |
申请人 |
AOI ELECTRONICS CO., LTD.;SII NANO TECHNOLOGY INC. |
发明人 |
KOBAYASHI TATSUYA;SUZUKI MASATO;YASUTAKE MASATOSHI;UMEMOTO TAKESHI |
分类号 |
G01B5/28;B25J7/00;B25J15/08;B81B3/00;B81C1/00;G01Q30/20;G01Q60/38;G01Q70/10;G01Q80/00 |
主分类号 |
G01B5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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