发明名称 Method of forming a display device by using separate masks in forming source and drain regions of MOS transistors
摘要 A method of forming a display device is provided. The method includes the following steps: providing a substrate which includes a driving circuit region and a pixel region; forming a first island and a second island in the driving circuit region on the substrate with a semiconductor material; performing a first ion implantation process to dope ions into both of the first island and the second island; forming a first patterned mask on the substrate to cover the second island and expose a part of the first island; performing a second ion implantation process by using the first patterned mask as a mask to form a first source/drain region in the first island; removing the first patterned mask; forming a first gate and a second gate on the first island and the second island respectively; forming a second patterned mask on the substrate to cover the first island and expose a part of the second island; and performing a third ion implantation process by using both of the second patterned mask and the second gate as a mask to form a second source/drain region in the second island. The first island, the first source/drain region, and the first gate form a NMOS device, and the second island, the second source/drain region, and the second gate form a PMOS device.
申请公布号 US8030143(B2) 申请公布日期 2011.10.04
申请号 US20090468510 申请日期 2009.05.19
申请人 TPO DISPLAYS CORP. 发明人 LIN TSUNG-YEN;PENG CHIH-HUNG;WU CHIEN-PENG;TSAI SHAN-HUNG;YEH YI CHUN
分类号 H01L21/00;H01L21/84 主分类号 H01L21/00
代理机构 代理人
主权项
地址