发明名称 Bond pad structure having dummy plugs and/or patterns formed therearound
摘要 A semiconductor structure is provided. In one embodiment, a bond pad is formed above one or more underlying layers of a substrate. A plurality of dummy plugs are spaced around the bond pad, the plurality of dummy plugs substantially vertically traversing the one or more underlying layers, wherein the plurality of dummy plugs anchor at least two of the underlying layers together to achieve improved mechanical strength.
申请公布号 US8030781(B2) 申请公布日期 2011.10.04
申请号 US20080233974 申请日期 2008.09.19
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 YU CHEN-HUA;BAO TIEN-I
分类号 H01L23/485 主分类号 H01L23/485
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