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发明名称
晶圆测试方法
摘要
申请公布号
TWI349781
申请公布日期
2011.10.01
申请号
TW096143273
申请日期
2007.11.15
申请人
日月光半導體製造股份有限公司 高雄市楠梓加工區經三路26號
发明人
曹育诚 高雄市左营区荣总路506巷1号
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
刘育志 台北市大安区敦化南路2段77号19楼
主权项
一种晶圆测试方法,该测试方法包括:提供一晶圆,该晶圆上具有至少一焊垫;在该晶圆上覆盖一罩体(cap),并暴露出该至少一焊垫;以及以一探测模组通过该至少一焊垫,对该罩体晶圆作电性测试。
地址
高雄市楠梓加工区经三路26号
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