发明名称 |
PELLICLE CONTAINER AND TRANSPORT CARRIAGE OF PELLICLE CONTAINER |
摘要 |
<p>The invention provides a receiving container for a dustproof thin film component capable of receiving and safely transporting a large-scale dustproof thin film component and a trolley for transporting the same. A receiving container for a dustproof thin film component 10 comprises: a receiving container body for a dustproof thin film component 11 used for supporting the dustproof thin film component; a cover body 12 in a tabling in the opening part of the receiving container body for a dustproof thin film component 11 via the outer periphery and capable of receiving the dustproof thin film component between the cover body 12 and the receiving container body for a dustproof thin film component 11; and six foot parts 13 disposed at the bottom of the receiving container body for a dustproof thin film component 11. The foot parts 13 are constructed to be in a tabling at a rotatable mounting table of a transporting device for transporting a receiving container for a dustproof thin film component.</p> |
申请公布号 |
KR20110107266(A) |
申请公布日期 |
2011.09.30 |
申请号 |
KR20100136570 |
申请日期 |
2010.12.28 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
SEKIHARA KAZUTOSHI |
分类号 |
B65D85/86;G03F1/62;G03F1/66;H01L21/673;H01L21/677 |
主分类号 |
B65D85/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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