发明名称 PELLICLE CONTAINER AND TRANSPORT CARRIAGE OF PELLICLE CONTAINER
摘要 <p>The invention provides a receiving container for a dustproof thin film component capable of receiving and safely transporting a large-scale dustproof thin film component and a trolley for transporting the same. A receiving container for a dustproof thin film component 10 comprises: a receiving container body for a dustproof thin film component 11 used for supporting the dustproof thin film component; a cover body 12 in a tabling in the opening part of the receiving container body for a dustproof thin film component 11 via the outer periphery and capable of receiving the dustproof thin film component between the cover body 12 and the receiving container body for a dustproof thin film component 11; and six foot parts 13 disposed at the bottom of the receiving container body for a dustproof thin film component 11. The foot parts 13 are constructed to be in a tabling at a rotatable mounting table of a transporting device for transporting a receiving container for a dustproof thin film component.</p>
申请公布号 KR20110107266(A) 申请公布日期 2011.09.30
申请号 KR20100136570 申请日期 2010.12.28
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 SEKIHARA KAZUTOSHI
分类号 B65D85/86;G03F1/62;G03F1/66;H01L21/673;H01L21/677 主分类号 B65D85/86
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