发明名称 ELECTROMAGNETIC RADIATION SENSOR AND METHOD OF MANUFACTURE
摘要 A method of forming a semiconductor sensor in one embodiment includes providing a substrate, forming a reflective layer on the substrate, forming a sacrificial layer on the reflective layer, forming an absorber layer with a thickness of less than about 50 nm on the sacrificial layer, forming an absorber in the absorber layer integrally with at least one suspension leg, and removing the sacrificial layer.
申请公布号 KR20110107366(A) 申请公布日期 2011.09.30
申请号 KR20117018333 申请日期 2010.01.06
申请人 ROBERT BOSCH GMBH 发明人 LIGER MATTHIEU
分类号 H01L27/146 主分类号 H01L27/146
代理机构 代理人
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