Modular injector to inject gas in treatment chamber, comprises injectors including inlet to receive gas wave, curved section to dilate gas in direction perpendicular to propagation axis of gas and outlet to eject gas, and connection zone

摘要

The modular injector (11) comprises injectors including an inlet for receiving a gas wave or a gas pulse, a curved section (20) for dilating the gas in a direction perpendicular to a propagation axis of the gas and an outlet for ejecting the gas, and a connection zone. The section includes first and second walls (23), which diverge according to an angle of divergence with respect to the gas propagation axis. The connection zone extends between walls, and includes a unit for ejecting the gas in the vicinity of the connection zone. The modular injector (11) comprises injectors including an inlet for receiving a gas wave or a gas pulse, a curved section (20) for dilating the gas in a direction perpendicular to a propagation axis of the gas and an outlet for ejecting the gas, and a connection zone. The section includes first and second walls (23), which diverge according to an angle of divergence with respect to the gas propagation axis. The connection zone extends between walls, and includes a unit for ejecting the gas in the vicinity of the connection zone at a rate greater than the ejection of gas near the center of the outlet to compensate the lack of gas ejected in the connection zone. The gas ejected by the outlet has a velocity profile with a variation of less than 90%. The injectors further include a diffusion plate including openings for the passage of gas, a constriction region, a first dilation region (25) in which the walls diverge according to a first angle of divergence, and a second dilation region (26) in which the walls diverge according to a second angle of divergence, which is lower than the first divergence angle. A height of the section varies according to an axis perpendicular to the propagation axis. The constriction region has a first height close to the center of the section and a second height close to the wall. The first height is lower than the second height so as to slow down the velocity of the gas close to the center of the section and the wall. The first angle of divergence varies with the second angle of divergence, and has a maximum value at the end of the first region. Independent claims are included for: (1) a system for depositing thin layers in an injector; and (2) a process for injection of a gas wave or a gas pulse in a treatment chamber.