| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a resist pattern forming method and a fine structure manufacturing method, in which resist pattern deformation can be suppressed. <P>SOLUTION: The resist pattern forming method for forming a resist pattern on a surface of a substrate includes a step of forming the resist pattern so that the size of an end of the resist pattern on the substrate side is longer than that of an end thereof on a side opposed to the end on the substrate side. <P>COPYRIGHT: (C)2011,JPO&INPIT |
