| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of inspecting with a different resolution per each partial region to be examined. SOLUTION: The X-ray inspection device 100 includes an X-ray source 10 outputting X-rays so that X-rays enter into an object 1 from two or more directions, an X-ray detector 23 imaging X-rays at an image reception area of a position where X-rays reach that enter into the object from the directions and transmit through the object, and an inspected object drive mechanism 110 for moving the position of the object within a horizontal plane. A magnification is changed by moving the X-ray source 10 and the X-ray detector 23 while maintaining the distance between a focal point and an image receiver of between the X-ray source 10 and the X-ray detector 23 and reconstruction image data of the object is generated based on intensity distribution data of X-rays imaged at each position. COPYRIGHT: (C)2011,JPO&INPIT |
