STEERING DEVICE FOR CONTROLLING THE DIRECTION AND/OR VELOCITY OF DROPLETS OF A TARGET MATERIAL AND EXTREME EUV SOURCE WITH SUCH A STEERING DEVICE

摘要

The invention relates to a steering device (24) for controlling the direction and/or velocity of droplets (19) of a target material, which are dispensed by a target delivery system (17) to move to a EUV production site (20) for being irradiated by a focused laser beam (34). Increased conversion efficiency and frequency of operation is achieved by said steering device (24) comprising deflecting and/or accelerating means (27) arranged along a droplet path from the target delivery system (17) to the EUV production site (20).