| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a photoelectric conversion device that has improved photoelectric conversion efficiency and stability by forming fine recesses, and to provide a method of manufacturing the photoelectric conversion device. <P>SOLUTION: The photoelectric conversion device includes a glass substrate 2 and a transparent conductive film 3 which covers at least a part of a principal surface of the glass substrate 2 and has an uneven shape on a surface on the opposite side from the substrate side. The photoelectric conversion device further includes a p layer 5 which covers at least a part of the uneven shape of the transparent conductive film 3 and has a first conductivity type, and an i layer 6 which covers the p layer 5. The uneven shape has projections of 50 to 1,200 nm in maximum height. The projection has on a surface, fine recesses in which intervals of local tops are 2 to 25 nm. The p layer 5 has a layer thickness larger at a part formed on the bottom of the fine recess than at a part formed on other than the bottom. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
